Manufacturing method of electro-optical apparatus substrate, manufacturing method of electro-optical apparatus, electro-optical apparatus substrate, electro-optical apparatus, and electronic instrument

摘要

A manufacturing process of an electro-optical apparatus substrate is provided wherein a substrate is coated with a photosensitive resin. A first exposure process is executed with a first reticle to form an uneven portion on the substrate. Subsequently, a second exposure process is executed with a second reticle to remove all the photosensitive resin on portions other than the uneven portion. After the second exposure process, the substrate is developed so as to form an underlying film having an uneven portion.