发明名称 Optical alignment loops for the wafer-level testing of optical and optoelectronic chips
摘要 This application describes, among others, wafer designs, testing systems and techniques for wafer-level optical testing by coupling probe light to/from the top of the wafer. A wafer level test system uses an optical probe to search for and align with an optical alignment loop. The test system uses a located alignment loop as a reference point to locate other devices on the wafer. The test system tests the operation of selected devices disposed on the wafer. The alignment loop is also used as a reference device for an adjacent device of unknown performance.
申请公布号 US7224174(B1) 申请公布日期 2007.05.29
申请号 US20040015957 申请日期 2004.12.17
申请人 LUXTERA, INC. 发明人 MALENDEVICH ROMAN;SUSSMAN MYLES;GUNN, III LAWRENCE C.
分类号 G01R31/02 主分类号 G01R31/02
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