| 摘要 |
A supply control apparatus is provided and includes a memory for storing lot control data for controlling a plurality of lots, reticule control data for controlling a plurality of masks, and inline photo device control data; an update section for updating the data; a control information generating section generating lot supply control information for controlling lot supply based on the lot control data and the reticule control data, as well as mask supply control information for controlling mask supply; and a communications section for transmitting the lot supply control information to a lot supply device that supplies lots to the photo device, transmitting the mask supply control information to a mask supply device that supplies masks to the photo device, while receiving notification information on the current position of a lot or a mask from the lot supply device, the mask supply device or the photo device.
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