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发明名称
EQUIPMENT FOR ETCHING SEMICONDUCTOR DEVICE
摘要
申请公布号
KR20070054312(A)
申请公布日期
2007.05.29
申请号
KR20050112178
申请日期
2005.11.23
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JONG JUN
分类号
H01L21/02;H01L21/3065
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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