发明名称 |
Test structures in unused areas of semiconductor integrated circuits and methods for designing the same |
摘要 |
The present invention is test structures in unused areas of semiconductor integrated circuits and methods for designing the same. In an exemplary aspect of the present invention, a method for placing test structures in a semiconductor integrated circuit includes: (a) detecting a dummy area in a semiconductor integrated circuit, the semiconductor integrated circuit including probe pads on a top metal layer; (b) filling the dummy area with active test cells, the active test cells being connected to one another; and (c) connecting each of the active test cells to the probe pads with a metal line.
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申请公布号 |
US7223616(B2) |
申请公布日期 |
2007.05.29 |
申请号 |
US20040862049 |
申请日期 |
2004.06.04 |
申请人 |
LSI CORPORATION |
发明人 |
DUAN FRANKLIN;ARDANS MAUREEN;SONG JUN |
分类号 |
G01R31/26;G01R31/02;G01R31/28;H01L21/66;H01L23/544;H01L23/58;H01L29/10 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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