发明名称 Circuit and method for a folded bit line memory cell with vertical transistor and trench capacitor
摘要 A memory cell for a memory array in a folded bit line configuration. The memory cell includes an access transistor formed in a pillar of single crystal semiconductor material. The access transistor has first and second source/drain regions and a body region that are vertically aligned. The access transistor further includes a gate coupled to a wordline disposed adjacent to the body region. The memory cell also includes a passing wordline that is separated from the gate by an insulator for coupling to other memory cells adjacent to the memory cell. The memory cell also includes a trench capacitor. The trench capacitor includes a first plate that is formed integral with the first source/drain region of the access transistor. The trench capacitor also includes a second plate that is disposed adjacent to the first plate and separated from the first plate by a gate oxide.
申请公布号 US7223678(B2) 申请公布日期 2007.05.29
申请号 US20050214557 申请日期 2005.08.30
申请人 发明人
分类号 H01L21/8238 主分类号 H01L21/8238
代理机构 代理人
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