发明名称 |
Dielectric barrier discharge lamp with a base |
摘要 |
An elongated dielectric barrier discharge lamp with outer and inner electrodes has a tube that is arranged on the lamp stand end of the discharge vessel and that surrounds the lamp stand. The tube serves to receive a seal in order to install the lamp in a process chamber in a gastight manner. Power supply of the outer electrodes is separated from the power supply for the inner electrodes coming out of the lamp stand by means of the above-mentioned tube. This makes it possible to prevent effectively parasitic discharges between the power supplies which are applied at different potentials during operation also in process chambers under negative pressure.
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申请公布号 |
US7224111(B2) |
申请公布日期 |
2007.05.29 |
申请号 |
US20040514814 |
申请日期 |
2004.11.17 |
申请人 |
PATENT-TREUHAND-GESELLSCHAFT FUER ELEKTRISHE GLUEHLAMPEN MBH |
发明人 |
KLING RAINER;WITTKOETTER REINHOLD |
分类号 |
H01J11/00;H01J65/00;H01J;H01J5/48;H01J5/50;H01J5/54;H01J5/56;H01J61/02;H01J65/04 |
主分类号 |
H01J11/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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