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发明名称	ION IMPLANTATION METHOD AND APPARATUS
摘要
申请公布号	KR100722159(B1)	申请公布日期	2007.05.28
申请号	KR20040086146	申请日期	2004.10.27
申请人		发明人
分类号	C23C14/48;H01L21/265;H01J37/147;H01J37/317	主分类号	C23C14/48
代理机构		代理人
主权项
地址

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