摘要 |
<p>A magnetic recording media with a layered structure formed by using a magnetron sputtering system is disclosed. The layered structure magnetic recording media is fabricated with Feet alloy or (FePt)-Ag ternary alloy as the recording layer, where it is sputter deposited on an intermediate layer and underlayer sequentially on a substrate. Seed layer coated substrate are used to decrease the grain size of the underlayer and magnetic layer. Resulting face centered tetragonal Ll[err] ordered Feet films with (200) orientation is obtained. Elements or compounds with lattice constant and crystal structure that match well with the magnetic layer and/or chromium alloy underlayer are chosen as the intermediate layer. A minute amount of oxygen, nitrogen or air introduced during sputtering of all layers proved critical in controlling the longitudinal anisotropy of the films.</p> |