发明名称 METHOD OF FABRICATING L10 ORDERED FEPT FILMS WITH AS A MAGNETIC RECORDING MEDIA
摘要 <p>A magnetic recording media with a layered structure formed by using a magnetron sputtering system is disclosed. The layered structure magnetic recording media is fabricated with Feet alloy or (FePt)-Ag ternary alloy as the recording layer, where it is sputter deposited on an intermediate layer and underlayer sequentially on a substrate. Seed layer coated substrate are used to decrease the grain size of the underlayer and magnetic layer. Resulting face centered tetragonal Ll[err] ordered Feet films with (200) orientation is obtained. Elements or compounds with lattice constant and crystal structure that match well with the magnetic layer and/or chromium alloy underlayer are chosen as the intermediate layer. A minute amount of oxygen, nitrogen or air introduced during sputtering of all layers proved critical in controlling the longitudinal anisotropy of the films.</p>
申请公布号 SG131748(A1) 申请公布日期 2007.05.28
申请号 SG20020053494 申请日期 2002.09.02
申请人 DATA STORAGE INSTITUTE 发明人 CHEN JINGSHENG;LIM BOON CHOW;WANG JIAN-PING
分类号 (IPC1-7):G11B5/66 主分类号 (IPC1-7):G11B5/66
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