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发明名称
PROCESS FOR THE PREPARATION OF SINGLE CRYSTALLINE GALLIUM NITRIDE THICK LAYER
摘要
申请公布号
KR20070053855(A)
申请公布日期
2007.05.28
申请号
KR20050111583
申请日期
2005.11.22
申请人
SAMSUNG CORNING CO., LTD.
发明人
SHIN, HYUN MIN;LEE, CHANG HO
分类号
C30B29/38;C23C16/34;C30B25/10;H01L21/205
主分类号
C30B29/38
代理机构
代理人
主权项
地址
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