发明名称 WET CLEANING APPARATUS WITH STEAM DISPENSING TYPE
摘要 A wet cleaning apparatus with an improved cleaning performance is provided to reduce the cleaning time and costs of the apparatus by using steam spraying at an initial cleaning process. A nozzle assembly includes a deionized water spraying nozzle for spraying deionized water onto an object to be cleaned and steam spraying nozzles installed in front of the deionized water spraying nozzle for spraying steam of predetermined pressure before the deionized water is sprayed. A shaft(43) penetrates a chamber in a longitudinal direction. A nozzle base(46) is connected to a movable bracket, and a nozzle body(47) and a tip(48) are provided on a lower end of the nozzle base. An adjusting handle(42) is disposed to an exposed upper end of the shaft.
申请公布号 KR100724696(B1) 申请公布日期 2007.05.28
申请号 KR20060099192 申请日期 2006.10.12
申请人 JAE, MAN HO 发明人 JAE, MAN HO
分类号 H01L21/304 主分类号 H01L21/304
代理机构 代理人
主权项
地址