| 摘要 |
PROBLEM TO BE SOLVED: To perform non-prism measurement and prism measurement by only using the means for splitting the light of different wave length into distance measurement light and reference light for a mechanical moving part. SOLUTION: During non-prism measurement, the light of the visible laser diode 12a is emitted to the target and the optical fiber 20 through the dichroic mirrors 22, 30, and the reflection mirror 32, 34. In prism measurement, the light of infrared light laser diode 12b is introduced into the dichroic mirror 22 so as to reflect to the optical fiber 26 side, and the light diverged by the fiber 26 is emitted to the reflection prism 58 and the optical fiber 20 from the dichroic mirror 30 through the reflection mirrors 32 and 34. The reflection light from the target or the reference light from the optical fiber 20 is converted into the distance measurement signal or the reference signal by a light-receiving diode 42. The distance to the target is obtained based on the phase difference between both the signals. COPYRIGHT: (C)2007,JPO&INPIT
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