NANOWIRE SENSOR FOR DETECTING EXTERNAL ENVIRONMENT AND METHOD FOR MANUFACTURING NANOWIRE SENSOR FOR DETECTING EXTERNAL ENVIRONMENT

摘要

PROBLEM TO BE SOLVED: To provide a wire sensor for detecting an external environment and a method for manufacturing a nanowire sensor for detecting an external environment by growing a metal nanowire without using a cast mold structure. SOLUTION: The method for manufacturing a nanowire sensor for detecting an external environment includes steps of: growing a first plurality of nanowires 108 on a substrate 102 such as silicon; depositing an insulator layer 120 on the first plurality of nanowires 108; exposing the top ends 116 of the first plurality of nanowires by etching; forming a metal electrode 112 patterned in such a manner that the end portion 114 of the electrode is across over the top ends 116 of the first plurality of nanowires; and exposing the first plurality of nanowires 108 below the end portion 114 of the electrode by etching. Otherwise, the method may includes forming a growth promotion layer on the substrate. The structure grows from the selectively formed growth promotion layer and contains exposed nanowires. COPYRIGHT: (C)2007,JPO&INPIT