MICROMACHINED ASSEMBLY WITH A MULTI-LAYER CAP DEFINING CAVITY
摘要
This invention comprises a process for fabricating a micro mechanical structure in a sealed cavity having a multi-layer high stiffness cap. The high stiffness material used for the cap protects the underlying microstructure from destructive environmental forces inherent in the packaging process and from environmental damage.
申请公布号
WO2004077523(A3)
申请公布日期
2007.05.24
申请号
WO2004US05618
申请日期
2004.02.25
申请人
IC MECHANICS, INC.;CARLEY, RICHARD, L.;SANTHANAM, SURESH