| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow sensor eliminated with conventional defect capable of easily realizing the high sensitivity and that will not generate tilting errors. <P>SOLUTION: The flow sensor for detecting the fluid flow from the change of the temperature distribution caused by the change of fluid flow flowing in a flow path comprises: a flow path provided with a pair of parallel part and a resistance temperature detector, provided on a part of the parallel part for heating the fluid to a prescribed temperature. The flow sensor is characterized in that on either side of the parallel part, on the upstream side, the first upstream side resistance temperature detector and on the downstream side, the first downstream side resistance temperature detector are provided parallel, and on the other side of the parallel part, on the upstream side, the second upstream side resistance temperature detector and on the downstream side, the second downstream side resistance temperature detector are provided parallel. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
