| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid immersion microscope apparatus designed so as to restrain soil from sticking to the surface of a substrate (a part which is in contact with a liquid) during liquid immersion observation. SOLUTION: The liquid immersion microscope apparatus includes: support means 21 and 22 which support a substrate 10A to be observed; an immersion objective lens 23; supply means 24 and 29 which supply liquid 19 between the leading edge of the objective lens and the substrate; image taking means 28 and 29 which take in an image of the substrate via the liquid and the objective lens; and removal means 25 and 29 which remove the liquid from the substrate when a predetermined time has passed from the supply of the liquid by the supply means. COPYRIGHT: (C)2007,JPO&INPIT
|
