| 摘要 |
PROBLEM TO BE SOLVED: To provide an evacuation device inhibiting enlargement of a device and capable of securing appropriate discharging action of a main pump. SOLUTION: This evacuation device is provided with a buffer tank 11 relieving delivery gas pressure from the main pump 2 between the main pump 2 and an auxiliary pump 3. Sudden pressure rise generated on a delivery side of the main pump 2 right after start operation is prevented, and reliability can be improved by securing appropriate discharge action of the main pump 2 by this structure. Since smaller auxiliary pump 3 can be adopted even if a buffer tank 11 is added, enlargement of the device can be inhibited. COPYRIGHT: (C)2007,JPO&INPIT
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