TITANIUM OR TITANIUM ALLOY IN VACUUM DEVICE AND METHOD FOR PRODUCING THE SAME

摘要

PROBLEM TO BE SOLVED: To provide titanium or a titanium alloy optimum for producing a vacuum device and a vacuum component reaching from a low vacuum to an extrahigh vacuum for the production and inspection of a semiconductor device and an electronic device and for the research of an accelerator or the like, and to provide a method for producing the same. SOLUTION: The surface of titanium or a titanium alloy is subjected to grinding and oxidation treatment with an acid liquid, and is thereafter subjected to washing treatment with water, thus a thin, uniform and dense surface oxidized layer of <10 nm is formed on the surface of the metal. COPYRIGHT: (C)2007,JPO&INPIT