发明名称 POWDER FOR THERMAL SPRAYING AND METHOD FOR FORMING THERMALLY SPRAYED COATING
摘要 <P>PROBLEM TO BE SOLVED: To provide powder for thermal spraying suitable for forming a thermally sprayed coating having excellent plasma etching resistance, and to provide a method for forming the thermally sprayed coating. <P>SOLUTION: The powder for thermal spraying comprises yttria granulated-sintered particles and yttria particulates. The average particle diameter of the yttria particulates comprised in the powder for thermal spraying is &le;1 &mu;m, and the content of the yttria particulates in the powder for thermal spraying is 1,000 to 10,000 ppmv. The average particle diameter of the yttria granulated-sintered particles comprised in the powder for thermal spraying is preferably 20 to 60 &mu;m. The powder for thermal spraying is preferably used for atmospheric plasma spraying. <P>COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007126710(A) 申请公布日期 2007.05.24
申请号 JP20050320116 申请日期 2005.11.02
申请人 FUJIMI INC 发明人 KITAMURA JUNYA;IBE HIROYUKI
分类号 C23C4/10;B05D1/08;H01L21/3065 主分类号 C23C4/10
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