发明名称 IMAGE EVALUATION METHOD AND MICROSCOPE
摘要 PROBLEM TO BE SOLVED: To provide an image evaluation method to objectively evaluate image resolution of a microscope image. SOLUTION: The image evaluation method is characterized in that resolution in partial regions of an image is obtained over an entire area of the image or a portion of the image and averaged over the entire area of the image or the portion of the image, and that average is to be a resolution evaluation value of the entire area of the image or the portion of the image. With this structure, this method eliminates subjective impressions of an evaluator in evaluation of microscope image resolution, so that image resolution evaluation values of high accuracy and good repeatability can be obtained. COPYRIGHT: (C)2007,JPO&INPIT
申请公布号 JP2007128913(A) 申请公布日期 2007.05.24
申请号 JP20070024988 申请日期 2007.02.05
申请人 HITACHI LTD 发明人 ISHITANI TORU;SATO MITSUGI;TODOKORO HIDEO;OTAKA TADASHI;IIIZUMI TAKASHI;TAKANE ATSUSHI
分类号 H01J37/28;H01J37/22;H01L21/66 主分类号 H01J37/28
代理机构 代理人
主权项
地址