| 摘要 |
PROBLEM TO BE SOLVED: To realize a charged particle beam apparatus, provided with an aberration correction device of higher orders, capable of correcting the spherical aberrations of fifth order and third-order color aberrations with the primary orbit of electron beam, without being disturbed by strength of a transfer lens. SOLUTION: The aberration correction device C is adjusted so that an image point 42 of the aberration correction device C is located at a position distant from a main face 38 of an object lens 24 toward the electron source side by a distance L0. The main face of the transfer lens 40 is arranged so as to coincide with the image point 42 of the aberration correction device C. Accordingly, since the primary orbit 36 of the electron beam passes through the center of the transfer lens 40, the electron beam will not be influenced by the strength of the transfer lens 40. In this state, the strength of the transfer lens 40 is set so that an aberration generating point 33 of the aberration correction device C is projected to a front side focus 34. In this way, spherical aberrations of fifth order and third color aberrations are corrected. COPYRIGHT: (C)2007,JPO&INPIT
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