| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a flow rate sensor capable of measuring correctly fluid flow even at an underdeveloped domain of flow (near inlet ports of tubes and outlet ports of curved tubes). <P>SOLUTION: Deforming a flexible substrate 22 forming a heater 21 to be mounted along the inner wall of a tube 10, the flexible flow rate sensor 20 where the heater 21 surrounds the inner wall of tube is constituted. As the flexible flow rate sensor 20 measures fluid flow through the tube as annular information (line information), dependency can be reduced on flow condition (flow distribution). A calibration curve which is acquired preliminarily of the variation of heater resistance to fluid flow is used to detect fluid flow. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
