发明名称 Plating method and apparatus
摘要 A plating method comprising applying an ultraviolet ray to a surface of a substrate or exposing a surface of a substrate to an ozone gas or bringing a surface to a substrate into contact with ozone water or bringing a surface of a substrate into contact with electrolytic ionized water or performing a team treatment using steam on a surface of a substrate, and plating the surface of the substrate after said applying, exposing, bringing or performing process. A plating method comprising performing a team treatment using steam on a surface of a substrate, and performing a wet process on the surface of the substrate of a substrate with an acidic plating solution, cleaning the surface of the substrate with pure water and cleaning the surface of the substrate with an alkalescent aqueous solution. A plating apparatus adapted to perform at least one of said methods.
申请公布号 US2007117365(A1) 申请公布日期 2007.05.24
申请号 US20040571751 申请日期 2004.09.29
申请人 EBARA CORPORATION 发明人 KURIYAMA FUMIO;KIUMI REI;SAITO NOBUTOSHI;TAKEMURA TAKASHI;KIMURA MASAAKI;TAKEDA SACHIKO;GUO YUGANG
分类号 H01L21/44;C23C18/16;C23C18/18;C25D5/34;C25D5/48;C25D7/12;H01L21/288;H05K3/24 主分类号 H01L21/44
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