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发明名称
Verfahren und Vorrichtung zum Ätzen von Silizium
摘要
申请公布号
DE60034274(D1)
申请公布日期
2007.05.24
申请号
DE20006034274
申请日期
2000.07.13
申请人
M-FSI LTD.;DISCO CORP.
发明人
YONEYA, AKIRA;KOBAYASHI, NORIYUKI;IZUTA, NOBUHIKO
分类号
H01L21/00;H01L21/306
主分类号
H01L21/00
代理机构
代理人
主权项
地址
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