| 摘要 |
PROBLEM TO BE SOLVED: To shorten a working hour for cleaning a vapor deposition chamber, and to show a sufficient cleaning effect. SOLUTION: This contamination preventing device is placed in a vapor deposition chamber 1 for accommodating a substrate on which a vapor deposition material vaporized from an evaporation source is vapor-deposited, and comprises: a paying-out section 13 for paying out a contamination-preventing sheet 15 in a roll form; a deposition surface 16 made of the paid-off contamination preventing sheet 15; and a sheet-winding section 14 for winding the waste contamination preventing sheet 15 on which a vapor deposition material has deposited on the deposition surface 16, into a roll form. COPYRIGHT: (C)2007,JPO&INPIT
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