发明名称 |
Apparatus for manufacturing semiconductor substrates |
摘要 |
This apparatus for manufacturing semiconductor substrates has support disks and holding units holding semiconductor substrates on the support disks. The holding unit has a stopper which is formed of a conductive material and holds the brim of the semiconductor substrate, a stopper holder which supports the stopper at the outer circumferential portion thereof, a retaining member which retains the stopper to the support disk, and a heating unit which heats the stopper.
|
申请公布号 |
US2007114458(A1) |
申请公布日期 |
2007.05.24 |
申请号 |
US20060510277 |
申请日期 |
2006.08.24 |
申请人 |
NAKAMURA SEIICHI;NISHIHATA HIDEKI;KASAMATSU RIYUNSUKE;TSUBUKU KAZUNORI;BANDO AKIRA;TSUMAKI NOBUO;WATANABE TOMOJI;MERA KAZUO;HAYASHI TSUNEO;KUROSAWA YOICHI |
发明人 |
NAKAMURA SEIICHI;NISHIHATA HIDEKI;KASAMATSU RIYUNSUKE;TSUBUKU KAZUNORI;BANDO AKIRA;TSUMAKI NOBUO;WATANABE TOMOJI;MERA KAZUO;HAYASHI TSUNEO;KUROSAWA YOICHI |
分类号 |
H01J37/08 |
主分类号 |
H01J37/08 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|