METHOD FOR FABRICATING CONTROLLED STRESS SILICON NITRIDE FILMS
摘要
<p>A method for fabricating a multiple layer silicon nitride film on a semiconductor substrate is provided herein. In one embodiment, a method for fabricating a multiple layer silicon nitride film on a semiconductor substrate includes providing a substrate over which the multiple layer silicon nitride film is to be formed; and forming the multiple layer silicon nitride film in a single processing reactor by: (a) depositing a base layer comprising silicon nitride on the base structure; (b) depositing a middle layer comprising a stress-controlling material on the base layer; and (c) depositing a top layer comprising silicon nitride on the middle layer. The stress-controlling material selectively increases or reduces the stress of the multiple layer silicon nitride film as compared to silicon nitride alone.</p>
申请公布号
WO2007058720(A1)
申请公布日期
2007.05.24
申请号
WO2006US39906
申请日期
2006.10.12
申请人
APPLIED MATERIALS, INC.;IYER, R., SURYANARAYANAN;TANDON, SANJEEV;SMITH, JACOB, W.
发明人
IYER, R., SURYANARAYANAN;TANDON, SANJEEV;SMITH, JACOB, W.