| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cathode substrate that is superior in electron focusing, to provide its preparation method, and to provide a display element and its preparation method. <P>SOLUTION: In the preparation method of the cathode substrate, at least having a cathode electrode, a gate electrode for forming a gate hole therein, a focus electrode for forming a focus hole therein, an insulating layer, and an emitter, after a sacrificial layer hole having a diameter not larger than that of a gate hole is formed in a sacrificial layer on the focus electrode, the focus hole having a diameter not smaller than that of the gate hole is formed from the sacrificial layer hole on the focus electrode by overetching. <P>COPYRIGHT: (C)2007,JPO&INPIT</p> |
