| 摘要 |
<P>PROBLEM TO BE SOLVED: To suppress attenuation of an elastic wave propagating on the surface of a substrate through existence of a sidewall, even if the sidewall for preventing the solution that is the treatment object from touching an electrode is provided on an electrode. <P>SOLUTION: In order to prevent liquid dripped onto the propagation path of a sensing elastic wave Ws from touching an excitation electrode 14 and a receiving electrode 16, a sidewall 20 is arranged to intersect the propagation path on the excitation electrode side and the receiving electrode side thereof. At the positions on the sidewall 20 facing the excitation electrode and the receiving electrode, tunnel portions 22a and 22b, having such a size as the liquid on the propagation path does not reach the electrode side are formed between the surface of the substrate 12 and the sidewall 20. A propagation path of sensing elastic wave Ws, extending from the excitation electrode 14 until the receiving electrode 16 passes through the tunnel portions 22a and 22b formed by the surface of the substrate 12 and the sidewall 20. <P>COPYRIGHT: (C)2007,JPO&INPIT |
