| 摘要 |
PROBLEM TO BE SOLVED: To increase detection sensitivity in an EPMA (electron probe micro analysis) unit. SOLUTION: A Frensnel zone plate 9 is provided as an X-ray converging means between a sample 2 on a sample block 3 and a spectral dispersive crystal 8. A characteristic X-ray 11 is generated from a sample 2 surface area, when a sample 2 surface on the sample block 3 is irradiated with an electron beam 6 emitted acceleratedly from a filament 5. The generated characteristic X-ray 11 is converged by the Frensnel zone plate 9 to get incident into the spectral dispersive crystal 8, and is spectrally dispersed by the spectral dispersive crystal 8 to get incident into an X-ray detector 10. A characteristic X-ray quantity incident into the spectral dispersive crystal 8 increases therein to increase the detection sensitivity, since the Frensnel zone plate 9 is used as the X-ray converging means. COPYRIGHT: (C)2007,JPO&INPIT
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