| 摘要 |
PROBLEM TO BE SOLVED: To provide a processing system that improves productivity by effectively utilizing the resources of the whole system as soon as possible, even if there is dispersion in conditioning times of each process to a desired process. SOLUTION: In the processing system, if the conditioning times are not well arranged to desired process recipes among process modules PM<SB>1</SB>, PM<SB>2</SB>, PM<SB>3</SB>, and PM<SB>4</SB>; substrate transport is started on the transport path to operate the process modules, at a time when even any one of the conditionings of those process modules PM<SB>1</SB>, PM<SB>2</SB>, PM<SB>3</SB>, and PM<SB>4</SB>is completed. COPYRIGHT: (C)2007,JPO&INPIT
|
