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发明名称
NEUE ZUSAMMENSETZUNG ZUM SELEKTIVEN ÄTZEN VON OXIDEN AUF METALLEN
摘要
申请公布号
DE60028726(T2)
申请公布日期
2007.05.24
申请号
DE20006028726T
申请日期
2000.10.12
申请人
FUJIFILM ELECTRONIC MATERIALS USA INC.
发明人
HONDA, KENJI;ELDERKIN, MICHELLE
分类号
C09K11/08;H01L21/321;C11D7/08;C11D7/10;C11D7/26;C11D11/00;C23G1/06;C23G1/10;G03F7/42;H01L21/02;H01L21/304;H01L21/308;H01L21/3213
主分类号
C09K11/08
代理机构
代理人
主权项
地址
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