| 摘要 |
PROBLEM TO BE SOLVED: To provide an organic thin film forming method which achieves shortening of the time to form an organic thin film, can be easily adaptive to various sizes of base materials and enables the base material to be washed uniformly even when the base material is a complicated three-dimensional structure. SOLUTION: The organic thin film forming method used for forming the organic thin film on the surface of the base material, includes a step (A) of washing the base material with ozonized water or oxygenated water. It is preferable that the concentration of ozone in the ozonized water is 5-100 ppm and the concentration of hydrogen peroxide in the oxygenated water is 1-30 wt.%. COPYRIGHT: (C)2007,JPO&INPIT
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