| 摘要 |
PROBLEM TO BE SOLVED: To provide a separating method of a substrate placing member for separating a base member and an electrostatic chuck in a short time without giving a scratch to the base member, etc., and to provide the recycling method of the separated base member and the electrostatic chuck. SOLUTION: The separating method of the substrate placing member separates the above-mentioned electrostatic chuck 5 and the base member 3 from the substrate placing member 1 joining the electrostatic chuck 5 and the base member 3 through an organic adhesive layer 7. The above-mentioned electrostatic chuck 5 is suspended to a support 35 while the above-mentioned substrate placing member 1 is heated to the thermal decomposition point of the dimensions from the thermal decomposition origination temperature to the thermal decomposition end temperature while softening the above-mentioned organic adhesive layer 7 and decomposing, and separated by adding a separating load by the prudence of the base member 3. COPYRIGHT: (C)2007,JPO&INPIT |
