| 摘要 |
PROBLEM TO BE SOLVED: To provide a hard coating film capable of suppressing wear increase caused by the temperature rise by realizing higher hardness of the coating film, enhancing the wear resistance thereof, and improving the heat resistance, and to provide a multi-layered film coated member with a plurality of layers of hard coating films coated thereon, and its manufacturing method. SOLUTION: In the multi-layered film coated member, two or more layers of hard coating films with different compositions are coated on a surface of a base material. The hard coating film has at least a hard coating film A and a hard coating film B. The hard coating film A is expressed by Si(B<SB>u</SB>C<SB>v</SB>N<SB>w</SB>O<SB>z</SB>), where u, v, w, z denote atm.% of each element, and inequalities u>0, v>0, w>0, z≥0, and the formula u+v+w+z = 1 are satisfied. The hard coating film contains two or more selected from Al, Ti, Cr, Nb, Mo, W, Zr, V and Si, and one or more selected from B, C, N, O and S. COPYRIGHT: (C)2007,JPO&INPIT
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