| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a cooling apparatus of a vacuum vaporized material in which the cooling treatment of the treating article after recovering the vacuum vaporized material can efficiently be executed in a short time and the producing efficiency of metals for reuse can drastically be improved. SOLUTION: To a vacuum heating chamber 1 in the vacuum vaporized recovering device, a first cooling chamber 2 is disposed through a heat insulating door and a second cooling chamber 3 is disposed to the first cooling chamber 2 through a vacuum door and a third cooling chamber 4 is successively provided through a double vacuum door 8. In the vacuum heating chamber 1, a treating article carry-out means 22 for shifting the treating article 15 into the first cooling chamber 2, is arranged. Further, in each cooling chamber, a cooling means, pressure reducing means and treating article carrying means 25 are arranged and the treating article from the vacuum heating chamber 1 to the cooling chamber 4 at the last stage can be shifted and thereby, the treating article can be cooled step by step according to the shift between the cooling chambers.</p> |
