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发明名称
METHOD OF MAKING A MEMS ELECTROSTATIC CHUCK
摘要
申请公布号
EP1678752(B1)
申请公布日期
2007.05.23
申请号
EP20040796693
申请日期
2004.10.28
申请人
AXCELIS TECHNOLOGIES, INC.
发明人
KELLERMAN, PETER;QIN, SHU;ALLEN, ERNIE;BROWN, DOUGLAS
分类号
H01L21/68;H01L21/683
主分类号
H01L21/68
代理机构
代理人
主权项
地址
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