| 摘要 |
An imprinting apparatus (10), for transferring a microstructure (18a) of a mold (18) onto a forming material (19) by pressing and mold-releasing, includes a plurality of driving devices (11,23) which relatively move the mold (18) and the forming material (19) to each other along an axis of a pressing direction, wherein the plurality of driving devices (11,23) make different relative moving speeds of the mold (18) and the forming material (19) during the relative motion.
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