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发明名称
摘要
申请公布号
JP3918661(B2)
申请公布日期
2007.05.23
申请号
JP20020198386
申请日期
2002.07.08
申请人
发明人
分类号
H01L21/52;H01L21/50
主分类号
H01L21/52
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