| 摘要 |
A planar motor device and the like which can shift at a high acceleration, provide a high aligning accuracy and can be efficiently driven is provided. The planar motor (15) includes a fixed part (16) provided on a base member (14), and a moving part (17) provided on a stage unit (WST1). The fixed part (16) is provided with core members (22), which are arranged at prescribed intervals within an XY plane with a coil (21) wound around, and leading edge parts of head parts (22a) of the core members (22) are set to be within a substantially one plane. On the bottom plane of a first stage (25) of the stage unit (WST1), permanent magnets (26) are arranged at prescribed intervals in an X direction and a Y direction. |
