| 摘要 |
<p>By varying the spacing between a partially-reflective, partially-transmissivesurface 16 and a highly reflective surface 14 positioned behind the partially-reflective,partially-transmissive surface 16, an interferometric modulator 12 selectivelycreates constructive and/or destructive interference between light wavesreflecting off the two surfaces 14, 16. The spacing can be varied by applying avoltage to create electrostatic attraction between the two surfaces 14, 16,which causes one or both surfaces 14, 16 to deform and move closer together. Inthe absence of such attraction, the surfaces 14, 16 are in a relaxed position,where they are farther apart from one another. An actuation voltage is neededto create sufficient electrostatic attraction to cause a surface 14, 16 to deform.The actuation voltage can be modified by implanting ions in a dielectric layer102 attached to one or both surfaces 14, 16. Upon the application of a voltage,the ions create a baseline level of repulsion or attract ion between the two surfaces14, 16, which thus require more or less voltage, respectively, to cause a surface14, 16 to deform. The degree of ion implantation can be chosen to set the actuationvoltage as desired, or the surfaces 14, 16 can be made to deform at a given voltageby appropriately selecting the degree of ion implantation.</p> |
