LIQUID SUBSTANCE SUPPLY DEVICE FOR VAPORIZING SYSTEM,申请号KR20070046453-传众专利搜索

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发明名称	LIQUID SUBSTANCE SUPPLY DEVICE FOR VAPORIZING SYSTEM
摘要
申请公布号	KR20070053199(A)	申请公布日期	2007.05.23
申请号	KR20070046453	申请日期	2007.05.14
申请人	SHIMADZU CORPORATION;MITSUBISHI DENKI KABUSHIKI KAISHA	发明人	YOSHIOKA NAOKI;KAWAMOTO TATSUSHI;KAWAO MITSUSHI;MATSUNO SHIGERU;YAMADA. AKIRA;MIYASHITA SHOJI;UCHIKAWA FUSAOKI
分类号	H01L21/205;B01D1/00;C23C16/448;F16K11/20;F16K31/122	主分类号	H01L21/205
代理机构		代理人
主权项
地址

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