QUARTZ TUBE CLEANER FOR SEMICONDUCTOR PROCESS,申请号KR19930016811U-传众专利搜索

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发明名称	QUARTZ TUBE CLEANER FOR SEMICONDUCTOR PROCESS
摘要
申请公布号	KR960008103(Y1)	申请公布日期	1996.09.23
申请号	KR19930016811U	申请日期	1993.08.27
申请人	POSCO;RIST	发明人	LEE, SUN - YONG
分类号	H01L21/324;(IPC1-7):H01L21/324	主分类号	H01L21/324
代理机构		代理人
主权项
地址

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