INDIRECT HEATING TYPE CLEANING APPARATUS,申请号KR20050130805-传众专利搜索

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发明名称	INDIRECT HEATING TYPE CLEANING APPARATUS
摘要
申请公布号	KR100723787(B1)	申请公布日期	2007.05.23
申请号	KR20050130805	申请日期	2005.12.27
申请人	DONGBU ELECTRONICS CO., LTD.	发明人	GO, JEONG HYUN
分类号	H01L21/304	主分类号	H01L21/304
代理机构		代理人
主权项
地址

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