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发明名称
COOLING APPARATUS OF CHAMBER WITH FUNCTION PREVENTING REFRIGERANTS LEAKAGE
摘要
申请公布号
KR20070052954(A)
申请公布日期
2007.05.23
申请号
KR20050110783
申请日期
2005.11.18
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
KIM, JONG JUN
分类号
H01L21/02
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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