| 摘要 |
Provided are a scanning capacitance microscope, which can be very sensitive to a variation of capacitance between a tip and a sample and can make a clear and accurate measurement by preventing stray capacitance, a method of the scanning capacitance microscope, and a recording medium having embodied thereon a program for the method. The scanning capacitance microscope includes: a resonator including a probe having a cantilever and a tip attached to an end of the cantilever, the resonator resonating according to capacitance between the tip of the probe and a sample; an oscillator generating and applying a signal having a variable frequency to the resonator; and a detector detecting a signal generated by the resonator. |
