Method for forming metal line using the dual damascene process,申请号KR20010031525-传众专利搜索

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发明名称	Method for forming metal line using the dual damascene process
摘要
申请公布号	KR100720402(B1)	申请公布日期	2007.05.22
申请号	KR20010031525	申请日期	2001.06.05
申请人		发明人
分类号	H01L21/28	主分类号	H01L21/28
代理机构		代理人
主权项
地址

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