发明名称 Semiconductor device including FinFET having vertical double gate structure and method of fabricating the same
摘要 A semiconductor device includes a semiconductor layer formed on a semiconductor substrate via an insulating film and having a projecting shape, a gate electrode formed, via a gate insulating film, on a pair of side surfaces of four side surfaces of the semiconductor layer and a source region and drain region formed on two side surfaces, on which the gate electrode is not formed, of the four side surfaces of the semiconductor layer. A portion of a channel region formed in the semiconductor layer is electrically connected to the gate electrode.
申请公布号 US7221032(B2) 申请公布日期 2007.05.22
申请号 US20050050437 申请日期 2005.02.04
申请人 KABUSHIKI KAISHA TOSHIBA 发明人 KONDO MASAKI
分类号 H01L29/76;H01L29/94;H01L31/062;H01L31/113;H01L31/119 主分类号 H01L29/76
代理机构 代理人
主权项
地址