| 摘要 |
The invention relates to a HF power supply device including an oscillator ( 11 ) outputting a HF signal, an amplifier ( 12 ) amplifying the output of the oscillator for supplying a HF output to a load, and a DC power supply ( 13 ) to supply a DC power voltage to the amplifier ( 11 ). The power supply device further includes a loss calculator ( 18 ) calculating a loss in the amplifier ( 11 ), a first controller ( 19 ) controlling the output of the power supply ( 13 ) and a second controller ( 20 ) controlling the output of the oscillator ( 11 ) or amplifier ( 12 ). When the calculated loss by the calculator ( 18 ) exceeds a predetermined loss set value, the first controller ( 19 ) lowers the output power voltage of the power supply ( 13 ) to make the calculated loss equal to the loss set value. When the calculated loss is no greater than the loss set value, the first controller ( 19 ) maintains the output power voltage at an appropriate DC voltage set value, while the second controller ( 20 ) controls the output of the oscillator ( 11 ) or amplifier ( 12 ) so that the HF output to the load from the amplifier ( 13 ) approaches a HF output set value.
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