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发明名称
PLASMA GENERATOR
摘要
申请公布号
KR100723019(B1)
申请公布日期
2007.05.22
申请号
KR20060093068
申请日期
2006.09.25
申请人
CMTECH
发明人
MIN, HUNG SIK;AN, YOUNG GEUN;YANG, SUNG JIN
分类号
H01L21/205;H05H1/34
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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